Vacuum demand in electronics assembly is usually intermittent, short-cycle and clean: holding wafers and substrates during handling, keeping components in place at placement and bonding stations, and drawing away debris and volatiles at inspection and cleaning positions. What these duties share is the need for oil-free exhaust, frequent start-stop, and a small unit that fits inside the machine.
An oil-free rotary vane pump produces no oil mist on the exhaust and needs simple piping and servicing, which makes it a practical vacuum source for this equipment. Confirm the working pressure required (holding is typically below 80 kPa), the instantaneous flow set by cup area and part weight, and the number of starts per minute.
Where the station is particle-sensitive, fit an inlet filter element and replace it on schedule. Where the gas carries flux volatiles, put a condensate separator ahead of the pump.